- ion-implantation chamber
- камера для ионной имплантации
English-Russian electronics dictionary .
ion-implantation chamber
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Ion implantation — is a materials engineering process by which ions of a material can be implanted into another solid, thereby changing the physical properties of the solid. Ion implantation is used in semiconductor device fabrication and in metal finishing, as… … Wikipedia
Plasma-immersion ion implantation — (PIII) [cite book | title = Materials Science of Thin Films | author = Milton Ohring | publisher = Academic Press | year = 2002 | isbn = 0125249756 | url = http://books.google.com/books?id=SOt yFjV xwC pg=PA267… … Wikipedia
Ion beam — An ion beam is a type of particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. Today s ion beam sources are typically derived from the mercury vapor thrusters… … Wikipedia
Focused ion beam — Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor and materials science fields for site specific analysis, deposition, and ablation of materials. The FIB is a scientific instrument that resembles a… … Wikipedia
Vacuum pump — A vacuum pump is a device that removes gas molecules from a sealed volume in order to leave behind a partial vacuum. The vacuum pump was invented in 1650 by Otto von Guericke. Types Pumps can be broadly categorized according to three… … Wikipedia
spectroscopy — spectroscopist /spek tros keuh pist/, n. /spek tros keuh pee, spek treuh skoh pee/, n. the science that deals with the use of the spectroscope and with spectrum analysis. [1865 70; SPECTRO + SCOPY] * * * Branch of analysis devoted to identifying… … Universalium
particle accelerator — accelerator (def. 7). [1945 50] * * * Device that accelerates a beam of fast moving, electrically charged atoms (ions) or subatomic particles. Accelerators are used to study the structure of atomic nuclei (see atom) and the nature of subatomic… … Universalium
Materials science — Simulation of the outside of the Space Shuttle as it heats up to over 1,500 °C (2,730 °F) during re entry into the Earth s atmosphere Materials science is an interdisciplinary field applying the properties of matter to various areas of… … Wikipedia
Friedel Sellschop — Infobox Scientist name = Friedel Sellschop image width = 130px caption = birth date = June 8, 1930 birth place = Luderitz, Namibia residence = South Africa nationality = South African death date = August 4, 2002 death place = field = Physics work … Wikipedia
Thin film — A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film construction. A… … Wikipedia
Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… … Wikipedia
